Atomic layer deposition: medical and biological applications
- 期刊名称International Materials Reviews
- 作者Skoog, S. A.; Elam, J. W.; Narayan, R. J.
- 卷第58卷
- 期第2期
- 印刷ISSN0950-6608
- 电子ISSN1743-2804
- 文件大小1121.78KB
- 发表时间2013-02
- DOI10.1179/1743280412Y.0000000009
- 页码113-129
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