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SPIE Proceedings [SPIE International Conference on Optical Instruments and Technology (OIT2013) - Beijing, China (Sunday 17 November 2013)] 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems - Study of the instrument transfer function of a free-form optics metrology system: SCOTS

SPIE Proceedings [SPIE International Conference on Optical Instruments and Technology (OIT2013) - Beijing, China (Sunday 17 November 2013)] 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems - Study of the instrument transfer function of a free-form optics metrology system: SCOTS

Su, Tianquan; Maldonado, Alejandro; Su, Peng; Zhou, Ping; Burge, James H.; Tam, Hwa-Yaw; Xu, Kexin; Xiao, Hai; Zhu, Jigui; Zhao, Chun-Liu
  • 作者Su, Tianquan; Maldonado, Alejandro; Su, Peng; Zhou, Ping; Burge, James H.; Tam, Hwa-Yaw; Xu, Kexin; Xiao, Hai; Zhu, Jigui; Zhao, Chun-Liu
  • 卷第9046卷
  • 印刷ISSN0277-786X
  • 文件大小376.90KB
  • 发表时间2013
  • DOI10.1117/12.2037040
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