SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] MEMS Adaptive Optics VII - A continuous single-crystal-silicon membrane deformable mirror using bimorph spring
- 作者Wu, Tong; Sasaki, Takashi; Akiyama, Masayuki; Hane, Kazuhiro; Olivier, Scot S.; Bifano, Thomas G.; Kubby, Joel
- 卷第8617卷
- 印刷ISSN0277-786X
- 文件大小693.79KB
- 发表时间2013
- DOI10.1117/12.2002785
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