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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Diffractive optical element for optical data storage

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Diffractive optical element for optical data storage

Yoshida, S.; Unno, N.; Akamatsu, H.; Yamada, K.; Taniguchi, J.; Yamamoto, M.; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.
  • 作者Yoshida, S.; Unno, N.; Akamatsu, H.; Yamada, K.; Taniguchi, J.; Yamamoto, M.; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.
  • 卷第8789卷
  • 印刷ISSN0277-786X
  • 文件大小456.56KB
  • 发表时间2013
  • DOI10.1117/12.2020591
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