SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Diffractive optical element for optical data storage
Yoshida, S.; Unno, N.; Akamatsu, H.; Yamada, K.; Taniguchi, J.; Yamamoto, M.; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.
- 作者Yoshida, S.; Unno, N.; Akamatsu, H.; Yamada, K.; Taniguchi, J.; Yamamoto, M.; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.
- 卷第8789卷
- 印刷ISSN0277-786X
- 文件大小456.56KB
- 发表时间2013
- DOI10.1117/12.2020591