Boron Removal from Silicon by Humidified Gases
- 期刊名称Metallurgical and Materials Transactions E
- 作者Safarian, Jafar; Tang, Kai; Hildal, Kjetil; Tranell, Gabriella
- 卷第1卷
- 期第1期
- 印刷ISSN2196-2936
- 电子ISSN2196-2944
- 文件大小649.15KB
- 发表时间2014-03
- DOI10.1007/s40553-014-0007-8
- 页码41-47
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