Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition
Mullings, Marja N.; Hägglund, Carl; Tanskanen, Jukka T.; Yee, Yesheng; Geyer, Scott; Bent, Stacey F.
- 期刊名称Thin Solid Films
- 作者Mullings, Marja N.; Hägglund, Carl; Tanskanen, Jukka T.; Yee, Yesheng; Geyer, Scott; Bent, Stacey F.
- 卷第556卷
- 印刷ISSN0040-6090
- 文件大小1802.54KB
- 发表时间2014-04
- DOI10.1016/j.tsf.2014.01.068
- 页码186-194