AlGaN based MEMS structures
- 期刊名称physica status solidi (c)
- 作者Hähnlein, Bernd; Tonisch, Katja; Ecke, Gernot; Grieseler, Rolf; Michael, Steffen; Schaaf, Peter; Pezoldt, Jörg
- 卷第11卷
- 期第2期
- 印刷ISSN1862-6351
- 文件大小388.71KB
- 发表时间2014-02
- DOI10.1002/pssc.201300153
- 页码239-243
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