Real time spectroscopic ellipsometry for analysis and control of thin film polycrystalline semiconductor deposition in photovoltaics

Koirala, Prakash; Attygalle, Dinesh; Aryal, Puruswottam; Pradhan, Puja; Chen, Jie; Marsillac, Sylvain; Ferlauto, Andre S.; Podraza, Nikolas J.; Collins, Robert W.

期刊名称Thin Solid Films
作者Koirala, Prakash; Attygalle, Dinesh; Aryal, Puruswottam; Pradhan, Puja; Chen, Jie; Marsillac, Sylvain; Ferlauto, Andre S.; Podraza, Nikolas J.; Collins, Robert W.
卷第571卷
印刷ISSN0040-6090
文件大小1526.55KB
发表时间2014-11
DOI10.1016/j.tsf.2013.10.158
页码442-446

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Real time spectroscopic ellipsometry for analysis and control of thin film polycrystalline semiconductor deposition in photovoltaics