In situ observation of Pt deposition process by using spectroscopic ellipsometry
- 期刊名称Microelectronic Engineering
- 作者Goto, Toshiaki; Watanabe, Mitsuhiro; Jin, Lianhua; Kondoh, Eiichi
- 卷第121卷
- 印刷ISSN0167-9317
- 文件大小1616.32KB
- 发表时间2014-06
- DOI10.1016/j.mee.2014.03.001
- 页码39-41
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