Effect of annealing on the electrical properties of insulating aluminum nitride in MIM and MIS structures
Ortiz, Carlos R.; Pantojas, Victor M.; Otaño-Rivera, Wilfredo
- 期刊名称Solid-State Electronics
- 作者Ortiz, Carlos R.; Pantojas, Victor M.; Otaño-Rivera, Wilfredo
- 卷第91卷
- 印刷ISSN0038-1101
- 文件大小919.23KB
- 发表时间2014-1
- DOI10.1016/j.sse.2013.10.013
- 页码106-111