Fast and scalable parallel layout decomposition in double patterning lithography

• 期刊名称Integration, the VLSI Journal
• 作者Zhao, Wei; Yao, Hailong; Cai, Yici; Sinha, Subarna; Chiang, Charles
• 卷第47卷
• 期第2期
• 印刷ISSN0167-9260
• 文件大小1928.12KB
• 发表时间2014-03
• DOI10.1016/j.vlsi.2013.09.002
• 页码175-183