Hyperthermal atomic oxygen beam irradiation effect on the Ti-containing DLC film

• 期刊名称Diamond and Related Materials
• 作者Kanda, Kazuhiro; Fukuda, Kazuhiro; Kidena, Kengo; Imai, Ryo; Niibe, Masahito; Fujimoto, Synya; Yokota, Kumiko; Tagawa, Masahito
• 卷第41卷
• 印刷ISSN0925-9635
• 文件大小562.45KB
• 发表时间2014-01
• DOI10.1016/j.diamond.2013.10.006
• 页码49-52