Simulation of inductively coupled plasma with applied bias voltage using COMSOL
- 期刊名称Vacuum
- 作者Ochoa Brezmes, Angel; Breitkopf, Cornelia
- 卷第109卷
- 印刷ISSN0042-207X
- 文件大小2035.19KB
- 发表时间2014-11
- DOI10.1016/j.vacuum.2014.06.012
- 页码52-60
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