A 0.1–40 GHz broadband MEMS clamped–clamped beam capacitive power sensor based on GaAs technology

• 期刊名称Journal of Micromechanics and Microengineering
• 作者Han, Juzheng; Liao, Xiaoping
• 卷第24卷
• 期第6期
• 印刷ISSN0960-1317
• 电子ISSN1361-6439
• 文件大小1737.46KB
• 发表时间2014-06-01
• DOI10.1088/0960-1317/24/6/065024