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Structural evolution, electrical and optical properties of AZO films deposited by sputtering ultra-high density target

Structural evolution, electrical and optical properties of AZO films deposited by sputtering ultra-high density target

Jiwen Xu,Zupei Yang,Hua Wang,Xiaowen Zhang
  • 期刊名称Bulletin of Materials Science
  • 作者Jiwen Xu,Zupei Yang,Hua Wang,Xiaowen Zhang
  • 卷第37卷
  • 期第4期
  • 印刷ISSN0250-4707
  • 电子ISSN0973-7669
  • 文件大小1180.55KB
  • 发表时间2014-06
  • DOI10.1007/s12034-014-0023-4
  • 页码895-902
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