发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

A Compliant MEMS Device for Out-of-Plane Displacements With Thermo-Electric Actuation

Vitellaro, Giuseppe; L'Episcopo, Gaetano; Trigona, Carlo; Ando, Bruno; Baglio, Salvatore

期刊名称Journal of Microelectromechanical Systems
作者Vitellaro, Giuseppe; L'Episcopo, Gaetano; Trigona, Carlo; Ando, Bruno; Baglio, Salvatore
卷第23卷
期第3期
印刷ISSN1057-7157
电子ISSN1941-0158
文件大小3673.73KB
发表时间2014-6
DOI10.1109/JMEMS.2013.2283520
页码661-671