Simulation, fabrication and characterization of an all-metal contact-enhanced triaxial inertial microswitch with low axial disturbance
Chen, Wenguo; Wang, Yan; Ding, Guifu; Wang, Hong; Zhao, Xiaolin; Yang, Zhuoqing
- 期刊名称Sensors and Actuators A: Physical
- 作者Chen, Wenguo; Wang, Yan; Ding, Guifu; Wang, Hong; Zhao, Xiaolin; Yang, Zhuoqing
- 卷第220卷
- 印刷ISSN0924-4247
- 文件大小1963.41KB
- 发表时间2014-12
- DOI10.1016/j.sna.2014.08.014
- 页码194-203