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High Stroke and High Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device Performance

High Stroke and High Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device Performance

Aktakka, Ethem Erkan; Peterson, Rebecca L.; Najafi, Khalil

期刊名称Journal of Microelectromechanical Systems
作者Aktakka, Ethem Erkan; Peterson, Rebecca L.; Najafi, Khalil
卷第23卷
期第2期
印刷ISSN1057-7157
电子ISSN1941-0158
文件大小3865.50KB
发表时间2014-04
DOI10.1109/jmems.2013.2279079
页码438-451

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