![Improvement of hydrogenated amorphous silicon properties with increasing contribution of SiH[sub 3] to film growth]()
Improvement of hydrogenated amorphous silicon properties with increasing contribution of SiH[sub 3] to film growthKessels, W. M. M.; Boogaarts, M. G. H.; Hoefnagels, J. P. M.; Schram, D. C.; van de Sanden, M. C. M. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2001