Nanotribological properties of ALD-processed bilayer TiO2/ZnO films
- 期刊名称Microelectronics Reliability
- 作者Wang, Wun-Kai; Wen, Hua-Chiang; Cheng, Chun-Hu; Hung, Ching-Hua; Chou, Wu-Ching; Yau, Wei-Hung; Yang, Ping-Feng; Lai, Yi-Shao
- 卷第54卷
- 期第12期
- 印刷ISSN0026-2714
- 文件大小2398.79KB
- 发表时间2014-12
- DOI10.1016/j.microrel.2014.07.148
- 页码2754-2759
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