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[IEEE 2014 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting - Memphis, TN, USA (2014.7.6-2014.7.11)] 2014 IEEE Antennas and Propagation Society International Symposium (APSURSI) - Boundary integral spectral element method for extreme ultraviolet multilayer defects analyses

[IEEE 2014 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting - Memphis, TN, USA (2014.7.6-2014.7.11)] 2014 IEEE Antennas and Propagation Society International Symposium (APSURSI) - Boundary integral spectral element method for extreme ultraviolet multilayer defects analyses

Niu, Jun; Luo, Ma; Liu, Qing Huo

作者Niu, Jun; Luo, Ma; Liu, Qing Huo
文件大小580.32KB
发表时间2014
DOI10.1109/aps.2014.6905324
页码1994-1995

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