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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Three-dimensional (3-D) reshaping technique in MEMS devices by solely electrical control with ultrafine tuning resolution

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Three-dimensional (3-D) reshaping technique in MEMS devices by solely electrical control with ultrafine tuning resolution

Yoon, Yong-Hoon; Han, Chang-Hoon; Yoon, Jun-Bo

作者Yoon, Yong-Hoon; Han, Chang-Hoon; Yoon, Jun-Bo
文件大小1325.51KB
发表时间2014
DOI10.1109/memsys.2014.6765727
页码660-663

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