Design optimization of high pressure and high temperature piezoresistive pressure sensor for high sensitivity
- 期刊名称Review of Scientific Instruments
- 作者Niu, Zhe; Zhao, Yulong; Tian, Bian
- 卷第85卷
- 期第1期
- 印刷ISSN0034-6748
- 电子ISSN1089-7623
- 文件大小2693.82KB
- 发表时间2014-01
- DOI10.1063/1.4856455
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