$[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - DOME-DISC: Diffractive optics metrology enabled dithering inertial sensor calibration$

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - DOME-DISC: Diffractive optics metrology enabled dithering inertial sensor calibration

Nadig, Sachin; Ardanuc, Serhan; Clark, Bill; Lal, Amit

作者Nadig, Sachin; Ardanuc, Serhan; Clark, Bill; Lal, Amit
文件大小1304.86KB
发表时间2014
DOI10.1109/memsys.2014.6765714
页码608-611

发现好书期刊，享受阅读乐趣