[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Monolithic piezoelectric in-plane motion stage with low cross-axis-coupling
- 作者Nadig, Sachin; Ardanuc, Serhan; Lal, Amit
- 文件大小1506.92KB
- 发表时间2014
- DOI10.1109/memsys.2014.6765693
- 页码524-527
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