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Structural and electrical characterization of annealed Si
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C
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/SiC thin film prepared by magnetron sputtering

Structural and electrical characterization of annealed Si _{1−
x} C _x /SiC thin film prepared by magnetron sputtering

Huang, Shi-Hua; Liu, Jian

期刊名称Chinese Physics B
作者Huang, Shi-Hua; Liu, Jian
卷第23卷
期第5期
印刷ISSN1674-1056
文件大小3579.92KB
发表时间2014-05
DOI10.1088/1674-1056/23/5/058105

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