Efficient source mask optimization using multipole source representation
- 期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
- 作者Yang, Chaoxing; Li, Sikun; Wang, Xiangzhao
- 卷第13卷
- 期第4期
- 印刷ISSN1932-5150
- 文件大小3956.94KB
- 发表时间2014-10-02
- DOI10.1117/1.JMM.13.4.043001
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