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Reaction mechanism of polymer removal using wet ozone

Goto, Yousuke; Angata, Yukihiro; Tsukazaki, Emi; Takahashi, Seiji; Koike, Kunihiko; Yamagishi, Tadaaki; Horibe, Hideo

期刊名称Japanese Journal of Applied Physics
作者Goto, Yousuke; Angata, Yukihiro; Tsukazaki, Emi; Takahashi, Seiji; Koike, Kunihiko; Yamagishi, Tadaaki; Horibe, Hideo
卷第53卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小333.42KB
发表时间2014-02-01
DOI10.7567/JJAP.53.02BB04