Prospects for dielectric constant reduction in integrated circuits interconnects
- 期刊名称MRS Proceedings
- 作者Darnon, Maxime; Posseme, Nicolas; Chevolleau, Thierry; David, Thibaut L.
- 卷第1692卷
- 电子ISSN1946-4274
- 文件大小3931.37KB
- 发表时间2014
- DOI10.1557/opl.2014.609
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