[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Investigation of different post HK annealing impact on HK film property and device performance

Yonggen He, ; Zhang, David Wei; Hailong Liu, ; Yong Chen, ; Guobing Yu, ; Youfeng He, ; Lan Jin, ; Jiaqi Wu, ; Jie Zhao, ; Weiji Song, ; Shaofeng Yu, ; Jingang Wu,

作者Yonggen He, ; Zhang, David Wei; Hailong Liu, ; Yong Chen, ; Guobing Yu, ; Youfeng He, ; Lan Jin, ; Jiaqi Wu, ; Jie Zhao, ; Weiji Song, ; Shaofeng Yu, ; Jingang Wu,
文件大小733.14KB
发表时间2014
DOI10.1109/IIT.2014.6939969
页码1-4

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[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Investigation of different post HK annealing impact on HK film property and device performance