Characteristics of Ion Beam Assisted ITO Thin Films Deposited by RF Magnetron Sputtering
Heo, Kyong Chan; Son, Phil Kook; Sohn, Youngku; Yi, Jonghoon; Kwon, Jin Hyuk; Gwag, Jin Seog
- 期刊名称Molecular Crystals and Liquid Crystals
- 作者Heo, Kyong Chan; Son, Phil Kook; Sohn, Youngku; Yi, Jonghoon; Kwon, Jin Hyuk; Gwag, Jin Seog
- 卷第601卷
- 期第1期
- 印刷ISSN1542-1406
- 电子ISSN1563-5287
- 文件大小468.00KB
- 发表时间2014-09-22
- DOI10.1080/15421406.2014.940493
- 页码57-63