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Doped Hafnium Oxide – An Enabler for Ferroelectric Field Effect Transistors

Doped Hafnium Oxide – An Enabler for Ferroelectric Field Effect Transistors

Mikolajick, Thomas; Müller, Stefan; Schenk, Tony; Yurchuk, Ekaterina; Slesazeck, Stefan; Schröder, Uwe; Flachowsky, Stefan; van Bentum, Ralf; Kolodinski, Sabine; Polakowski, Patrick; Müller, Johannes
  • 期刊名称Advances in Science and Technology
  • 作者Mikolajick, Thomas; Müller, Stefan; Schenk, Tony; Yurchuk, Ekaterina; Slesazeck, Stefan; Schröder, Uwe; Flachowsky, Stefan; van Bentum, Ralf; Kolodinski, Sabine; Polakowski, Patrick; Müller, Johannes
  • 卷第95卷
  • 电子ISSN1662-0356
  • 文件大小1195.06KB
  • 发表时间2014-10
  • DOI10.4028/www.scientific.net/ast.95.136
  • 页码136-145
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