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[IEEE 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Cannes, France (2014.4.1-2014.4.4)] 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Design and test of resonators using PiezoMUMPS technology

[IEEE 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Cannes, France (2014.4.1-2014.4.4)] 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Design and test of resonators using PiezoMUMPS technology

Pons-Nin, Joan; Gorreta, Sergi; Dominguez, Manuel; Blokhina, Elena; O'Connell, Diarmuid; Feely, Orla
  • 作者Pons-Nin, Joan; Gorreta, Sergi; Dominguez, Manuel; Blokhina, Elena; O'Connell, Diarmuid; Feely, Orla
  • 文件大小966.91KB
  • 发表时间2014
  • DOI10.1109/DTIP.2014.7056666
  • 页码1-6
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