[IEEE 2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) - Washington, DC, USA (2014.5.25-2014.5.29)] 2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) - Deposition of the silicon films from plasma ablation formed by a high power ion beam
Remnev, Gennady E.; Kholodnaya, Galina E.; Sazonov, Roman V.; Ponomarev, Denis V.
- 作者Remnev, Gennady E.; Kholodnaya, Galina E.; Sazonov, Roman V.; Ponomarev, Denis V.
- 文件大小177.86KB
- 发表时间2014
- DOI10.1109/plasma.2014.7012575
- 页码1-1