Mechanical/Structural Properties of ALD Zirconium Oxide (ZrO2) Thin Films for High-Tech Applications
- 期刊名称ECS Transactions
- 作者Mamun, M. A.; Baumgart, H.; Elmustafa, A. A.
- 卷第64卷
- 期第9期
- 印刷ISSN1938-6737
- 电子ISSN1938-5862
- 文件大小609.04KB
- 发表时间2014-08-13
- DOI10.1149/06409.0205ecst
- 页码205-210
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