Control of crystalline volume and nano crystal grain size in nanocrystalline silicon thin film deposited by PECVD
Bui, Thanh Tung; Dang, Mau Chien
- 期刊名称The European Physical Journal Applied Physics
- 作者Bui, Thanh Tung; Dang, Mau Chien
- 卷第68卷
- 期第2期
- 印刷ISSN1286-0042
- 电子ISSN1286-0050
- 文件大小578.45KB
- 发表时间2014-11
- DOI10.1051/epjap/2014140364