[ASME ASME 2014 International Manufacturing Science and Engineering Conference collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference - Detroit, Michigan, USA (Monday 9 June 2014)] Volume 1: Materials; Micro and Nano Technologies; Properties, Applications and Systems; Sustainable Manufacturing - Fabrication of Continuously Varying Thickness Micro-Cantilever Using Bulk Lithography Process
Bhole, Kiran; Ekshinge, Sunil; Gandhi, Prasanna
- 作者Bhole, Kiran; Ekshinge, Sunil; Gandhi, Prasanna
- 文件大小1823.30KB
- 发表时间2014
- DOI10.1115/MSEC2014-4041