Performance of a Sensitive Micromachined Accelerometer With an Electrostatically Suspended Proof Mass
- 期刊名称IEEE Sensors Journal
- 作者Han, Fengtian; Sun, Boqian; Li, Linlin; Wu, Qiuping
- 卷第15卷
- 期第1期
- 印刷ISSN1530-437X
- 电子ISSN1558-1748
- 文件大小632.67KB
- 发表时间2015-1
- DOI10.1109/JSEN.2014.2340862
- 页码209-217