The growth behavior and properties of atomic layer deposited zinc oxide films using hydrogen peroxide (H2O2) and ozone (O3) oxidants
Park, J.; Jung, Tae-Hoon; Lee, Jung-Hoon; Kim, Hyun-Suk; Park, Jin-Seong
- 期刊名称Ceramics International
- 作者Park, J.; Jung, Tae-Hoon; Lee, Jung-Hoon; Kim, Hyun-Suk; Park, Jin-Seong
- 卷第41卷
- 期第1期
- 印刷ISSN0272-8842
- 文件大小1521.48KB
- 发表时间2015-01
- DOI10.1016/j.ceramint.2014.09.133
- 页码1839-1845