Lift-off of large-scale ultrathin nanomembranes
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Miller, Joshua J; Carter, Robert N; McNabb, Kelly B; DesOrmeaux, Jon-Paul S; Striemer, Christopher C; Winans, Joshua D; Gaborski, Thomas R
- 卷第25卷
- 期第1期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小1422.37KB
- 发表时间2015-01-01
- DOI10.1088/0960-1317/25/1/015011
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