Electrical and optical properties of ZnO:Al films with different hydrogen contents in sputtering gas
- 期刊名称Rare Metals
- 作者Qu, Fei; Zhang, Teng; Gu, Hong-Wei; Qiu, Qing-Quan; Ding, Fa-Zhu; Peng, Xing-Yu; Wang, Hong-Yan
- 卷第34卷
- 期第3期
- 印刷ISSN1001-0521
- 电子ISSN1867-7185
- 文件大小787.73KB
- 发表时间2015-3
- DOI10.1007/s12598-014-0435-8
- 页码173-177
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