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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Hard mask free DRIE of crystalline Si nanobarrel with 6.7nm wall thickness and 50∶1 aspect ratio

[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Hard mask free DRIE of crystalline Si nanobarrel with 6.7nm wall thickness and 50∶1 aspect ratio

Liu, Peng; Yang, Fang; Wang, Wei; Wang, Wei; Luo, Kui; Wang, Ying; Zhang, Dacheng
  • 作者Liu, Peng; Yang, Fang; Wang, Wei; Wang, Wei; Luo, Kui; Wang, Ying; Zhang, Dacheng
  • 文件大小3334.46KB
  • 发表时间2015
  • DOI10.1109/MEMSYS.2015.7050890
  • 页码77-80
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