Modification and reduction of defects in thin gate dielectric of MIS devices by injection-thermal and irradiation treatments
- 期刊名称physica status solidi (c)
- 作者Andreev, Vladimir V.; Bondarenko, Gennady G.; Maslovsky, Vladimir M.; Stolyarov, Alexander A.; Andreev, Dmitry V.
- 卷第12卷
- 印刷ISSN1862-6351
- 文件大小266.56KB
- 发表时间2015-01
- DOI10.1002/pssc.201400151
- 页码126-130
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