Multiwavelength Raman analysis of SiOx and N containing amorphous diamond like carbon films

• 期刊名称Thin Solid Films
• 作者Tamulevičienė, Asta; Kopustinskas, Vitoldas; Niaura, Gediminas; Meškinis, Šarūnas; Tamulevičius, Sigitas
• 卷第581卷
• 印刷ISSN0040-6090
• 文件大小838.73KB
• 发表时间2015-04
• DOI10.1016/j.tsf.2014.11.042
• 页码86-91