Polishing of optoelectronic components made of monocrystalline silicon carbide

Filatov, Yu. D.; Vetrov, A. G.; Sidorko, V. I.; Filatov, O. Yu.; Kovalev, S. V.; Kurilovich, V. D.; Danil’chenko, M. A.; Prikhna, T. A.; Borimskii, A. I.; Katsai, A. M.; Poltoratskii, V. G.

期刊名称Journal of Superhard Materials
作者Filatov, Yu. D.; Vetrov, A. G.; Sidorko, V. I.; Filatov, O. Yu.; Kovalev, S. V.; Kurilovich, V. D.; Danil’chenko, M. A.; Prikhna, T. A.; Borimskii, A. I.; Katsai, A. M.; Poltoratskii, V. G.
卷第37卷
期第1期
印刷ISSN1063-4576
电子ISSN1934-9408
文件大小397.78KB
发表时间2015-1
DOI10.3103/S1063457615010086
页码48-56

发现好书期刊，享受阅读乐趣

Polishing of optoelectronic components made of monocrystalline silicon carbide