Fast and reliable simulations of argon inductively coupled plasma using COMSOL
- 期刊名称Vacuum
- 作者Brezmes, Angel Ochoa; Breitkopf, Cornelia
- 卷第116卷
- 印刷ISSN0042-207X
- 文件大小1618.66KB
- 发表时间2015-06
- DOI10.1016/j.vacuum.2015.03.002
- 页码65-72
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