Maskless laser processing of graphene
Wakaya, Fujio; Kurihara, Tadashi; Yurugi, Nariaki; Abo, Satoshi; Abe, Masayuki; Takai, Mikio
- 期刊名称Microelectronic Engineering
- 作者Wakaya, Fujio; Kurihara, Tadashi; Yurugi, Nariaki; Abo, Satoshi; Abe, Masayuki; Takai, Mikio
- 卷第141卷
- 印刷ISSN0167-9317
- 文件大小815.30KB
- 发表时间2015-06
- DOI10.1016/j.mee.2015.03.049
- 页码203-206