[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process
Gokhale, Vikrant J.; Figueroa, Cesar; Tsai, Julius Ming Lin; Rais-Zadeh, Mina
- 作者Gokhale, Vikrant J.; Figueroa, Cesar; Tsai, Julius Ming Lin; Rais-Zadeh, Mina
- 文件大小1375.83KB
- 发表时间2015
- DOI10.1109/memsys.2015.7050889
- 页码73-76