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Optimum Design Method of Sacrificial Layer Release Window for Aperture Cavity Type FBAR

Optimum Design Method of Sacrificial Layer Release Window for Aperture Cavity Type FBAR

Gao, Yang; He, Yi; Zhou, Bin; He, Wan Jing

期刊名称Applied Mechanics and Materials
作者Gao, Yang; He, Yi; Zhou, Bin; He, Wan Jing
电子ISSN1662-7482
文件大小674.28KB
发表时间2015-1
DOI10.4028/www.scientific.net/amm.719-720.157
页码157-167

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