A Self-Scanned Active-Matrix Tactile Sensor Realized Using Silicon-Migration Technology
- 期刊名称Journal of Microelectromechanical Systems
- 作者Zeng, Fan; Wong, Man
- 卷第24卷
- 期第3期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小3946.84KB
- 发表时间2015-6
- DOI10.1109/JMEMS.2014.2344025
- 页码677-684
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